基于一种易于制作的混合型表面等离激元波导结构的超紧凑截线滤波器

基于一种易于制作的混合型表面等离激元波导结构的超紧凑截线滤波器

内容简介：提出并分析了一种结构紧凑的截线型滤波器。该滤波器建立在一种硅基混合型表面等离激元波导结构上。与通常的混合等离激元结构相比，该波导结构在制作时只需对顶部的一层硅材料进行刻蚀，不需在光刻步骤进行对准和套刻，工艺简单易行。该截线滤波器由一截突柱波导与直波导耦合组成，并采用三维时域有限差分方法对其频谱响应进行模拟计算。计算结果表明该滤波器与现有文献中的二维金属-绝缘体-金属波导截线滤波器具有类似的频谱特性。另外，还进一步分析了截线部分及波导自身尺寸对器件输出频谱的影响。

Abstract：An ultra-compact wavelength filter on silicon-based hybrid plasmonic waveguide is proposed and simula-ted. The present hybrid plasmonic structure needs only one layer to be patterned and is favorable for fabrication. The light is confined strongly in a thin silica dioxide layer between the metal substrate and silicon top layer. The filter con-sists of a stub structure coupled to a straight waveguide. The output spectra calculated by the 3D FDTD method are similar as those devices based on the 2D metal-insulator-metal waveguide structure in the previous literatures. In ad-dition, the effects of the dimensions of the stub and waveguide structure on the device's performance are analyzed.

作者：朱凝, 张辉, 李浩,

关键词：金属表面等离激元, 截线滤波器, 硅基绝缘体材料, 混合型表面等离激元波导