1.55μm非晶硅热光F-P腔可调谐滤波器

1.55μm非晶硅热光F-P腔可调谐滤波器

内容简介：介绍了一种Si基热光Fabry-Perot (F-P)腔可调谐滤波器.F-P腔由电子束蒸发的非晶硅构成.利用非晶硅的热光效应,通过对Si腔加热,改变F-P腔的折射率,从而引起透射峰位的红移.该原型器件调谐范围为12nm,透射峰的FWHM(峰值半高宽)为9nm,加热效率约为0.1K/mW.精确控制DBR(分布式Bragg反射镜)生长获得高反射率镜面是减小带宽的有效途径;通过改进加热器所处位置及增强散热能力,有望进一步提高加热效率.

Abstract：A 1.55μm Fabry-Perot (F-P) thermo-optical tunable filter is fabricated.The cavity is made of amorphous silicon (a-Si) layer grown by electron-beam evaporation technique.Due to the excellent thermo-optical property of a-Si,the refractive index of the F-P cavity will be changed by heating;the transmittance resonant peak will therefore shift substantially.The measured tuning rang is 12nm, FWHM (full-width-at-half-maximum) of the transmission peak is 9nm,and heating efficiency is 0.1K/mW.The large FWHM is mainly due to the non-ideal coating deposition and mirror undulation.Possible improvements to increase the efficiency of heating are suggested.

作者：左玉华, 蔡晓, 毛容伟, 黄昌俊, 成步文, 李传波, 罗丽萍, 高俊华, 白云霞, 姜磊, 马朝华, 王良臣, 余金中, 王启明,

关键词：热光效应, Fabry-Perot, 可调谐滤波器, 非晶硅