新型RF-MEMS微天线的设计与实现

一种新型RF-MEMS微天线的设计与实现

内容简介：针对13.56MHz RFID系统大面积平面螺旋线圈天线存在的缺陷，提出了一种用于13.56MHz频段的新型RF-MEMS微天线，并使用HFSS软件进行了仿真和设计，同时采用MEMS工艺实现器件制作。该微天线由螺线管线圈及高性能铁氧体薄膜组成，总体尺寸小于10mm×6.7mm×0.46mm。该微天线灵敏度达到了36.2mV/μT，使用电感值为1.6μH的读卡器线圈与匹配谐振后的微天线进行耦合，在6mm处该微天线的谐振电压达到7.1V，同时将集成了标签芯片及谐振电容的微天线与符合 ISO14443标准的读卡器进行通信，其通信距离达到12mm。

Abstract：In this paper, a novel RF-MEMS antenna for 13.56MHz applications is presented to resolve the problems exist in the large area spiral antenna. RF-MEMS antenna is simulated and designed by means of high frequency structure simulator (HFSS) software. By MEMS process, the micro antenna has been fabricated, which consists of solenoid-type coil and high performance ferrite film, and has a measurement of less than 10mm×6.7mm×0.46mm. Test results show that the sensitivity of the micro antenna achieves 36.2mV/μT. Voltages up to 7.1 V were obtained at the resonant micro antenna from a 1.6μH reader coil at 6 mm distance. The assembled micro antenna with RFID chip and capacitor was tested using an ISO14443 type RFID reader at 13.56 MHz and successful communication was established at a distance of 12 mm.

作者：叶启, 曲炳郡, 耿玉洁,

关键词：射频识别(RFID), 微机电系统(MEMS), 微天线, 仿真, 设计,