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13.56MHz Generator connect via Matching network to Plasma chamber
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Hello,
I have a 50ohm 13.MHz Generator.
I have a 50Hm input matching L network.
The Cable from the Generator to the network is 1 λ. (50ft 0.6VF)
Now the question.
The match cannot be connected very closely and has another output coax that I was told should bea 1/16λ length. (38.1" 0.7VF). Other sources say to make it as short as possible. The shortest i could make it would be 30". Should I go for 1/4λ after the match?
Should the output cable be included in the 1λ length and the input cable shortened by that amount.
Thanks
Peter
I have a 50ohm 13.MHz Generator.
I have a 50Hm input matching L network.
The Cable from the Generator to the network is 1 λ. (50ft 0.6VF)
Now the question.
The match cannot be connected very closely and has another output coax that I was told should bea 1/16λ length. (38.1" 0.7VF). Other sources say to make it as short as possible. The shortest i could make it would be 30". Should I go for 1/4λ after the match?
Should the output cable be included in the 1λ length and the input cable shortened by that amount.
Thanks
Peter
You do notsay what the power is or the input impedance of the plasma chamber. I would put the matching network as close to the chamber as possible and most importantly tune it for minimum reflected power to the generator.
Frank
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