help： ADS Momentum sim error

I sim a 3 terminal diff L with 2008 ADS Momentum.
After loaded the inductor gds file into momentum, after change layer, set sim condtion. then rum sim.

But there a error out as:
Warning:
If the geometry contains lines that are within 1 degree of parallel they will be treated as parallel because the layout resolution is relatively coarse for this geometry. Plsease increase the layout reasolution if this causes problems.
Error:
MommSHmaker: internal error 11 -- segmentation violation.

I have set the VIAs as 3D as a topic question said, but error still out.
How to resolve it? Could anyone help me? Thanks!

申明：网友回复良莠不齐，仅供参考。如需专业帮助，请学习易迪拓培训专家讲授的ADS视频培训课程。