deembed in ads

hi,all
i've got the S parameters by the VNA ,but we only have the "open" and "through" deembed layout graph,so how can i get the intrinsic device S parameters.
we can subtract the paracisic capacitor by "open",but how can i subtract the resistor and inductor by "through" .please check my way as follows:
1. Smeas-->Ymeas,Sthru-->Ythru,Sopen-->Yopen
2.Y1=Ymeas-Yopen,Y2=Ythru-Yopen
3.Y1-->Z1,Y2-->Z2
4.Z11=Z1(11)-0.5*Z2(11)
Z12=Z1(12)
Z21=Z1(21)
Z22=Z1(22)-0.5*Z2(22)
5.Z-->S

sorry ,my english is not good ,hope you can get it!
thanks for your advise !

Y12 will give the through calculations

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